Embedded Thin-film Mirrors for Improved Optical Detection Sensitivity in Microchip Electrophoresis
نویسندگان
چکیده
In this study, we report a 4-fold improvement in fluorescence detection sensitivity as a result of integration of a thin-film mirror onto an Ormocomp-based electrophoresis separation chip. We report fabrication and performance characterization of planar thin-film Al mirrors embedded under the polymer microchannels. Furthermore, we present preliminary work on fabrication of concave thin-film mirrors inside microchannels by utilizing the light sensitivity of the Ormocomp photoresist during microchannel patterning by optical lithography.
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